1～5 item / All 5 items
Supports all processes including semiconductor wafer processes, LCD processes, optical fiber processes, and general research applications.
An analog mass flow controller that thoroughly pursues cost performance.
Wide range of applications from vacuum film forming devices to research experimental equipment.
This is an introduction to the low-cost mass flow controllers handled by Kawaguchi Liquefied Chemical Co., which supplies gas, vacuum, and low-temperature equipment R&D.
Supports 300mm wafer process.
Mass flow controller that achieves high precision and fast response over a wide range.
Adopting a through-type sensor.
Mass flow controller for liquids based on a new thermodynamic principle sensor design (international patent).
Adoption of a groundbreaking design (patented) Coriolis mass flow sensor.
A mass flow controller for liquids and gases that offers unparalleled high precision and zero stability in the field of small flow liquids, which are considered difficult to measure.
